The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Jan. 30, 2019
Screen Holdings Co., Ltd., Kyoto, JP;
Hideji Naohara, Kyoto, JP;
Masashi Akita, Kyoto, JP;
Abstract
A data processing method includes a sampling step of obtaining time series data based on a measurement result of a physical quantity in a substrate processing apparatus, an evaluation value calculation step of obtaining an evaluation value of the time series data by comparing the time series data with reference data, and a sampling period control step of controlling a sampling period used in the sampling step for each time series data. In the sampling period control step, all sampling periods are controlled to a normal period in an initial state, and when the evaluation value of the time series data is abnormal, the sampling period used when obtaining the time series data is controlled to an abnormal period shorter than the normal period.