The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Apr. 22, 2019
Lintec Co., Ltd., Shiga, JP;
LINTEC CO., LTD., Shiga, JP;
Abstract
Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer () includes a tank body (), a porous member () disposed in the vaporizer () and heated, a supply tube () configured to supply a liquid material (L) to the porous member (), and a gas discharge passage () configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet () of the supply tube () is disposed in contact with or in close proximity to the porous member (). When the outlet () is disposed in close proximity to the porous member (), a separation distance (H) between the outlet () and the porous member () is not greater than a distance from the outlet () to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet () by surface tension.