The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Aug. 17, 2020
Tdk Corporation, Tokyo, JP;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Other;
Abstract
A dual membrane microphone is disclosed. In an embodiment, a MEMS microphone includes a first membrane, a backplate with a separated central area including a first backplate electrode on a lower portion of the backplate, a second backplate electrode on a upper portion of the backplate and a backplate insulation layer galvanically isolating the first and the second backplate electrodes, a second membrane and a coupling central portion, wherein the first membrane couples mechanically to the separated central area of the backplate in an electrically isolating manner and the separated central area of the backplate couples to the second membrane in an electrically isolating manner.