The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Feb. 01, 2019
Applicant:
The Regents of the University of California, Oakland, CA (US);
Inventors:
Robert N. Candler, Los Angeles, CA (US);
Jimmy Chen-Yen Wu, Los Angeles, CA (US);
Ling Li, Los Angeles, CA (US);
Jere C. Harrison, Los Angeles, CA (US);
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); H01L 21/768 (2006.01); H01L 43/12 (2006.01); H01L 23/552 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3213 (2013.01); H01L 21/76898 (2013.01); H01L 23/552 (2013.01); H01L 43/12 (2013.01);
Abstract
A microfabrication process includes: (1) etching a shield pattern into a substrate; (2) forming a set of shielding layers on the substrate and in the shield pattern, wherein the shielding layers include n+1 magnetic layers and n spacing layers, n is 0 or an integer that is 1 or greater than 1, and each spacing layer is disposed between a pair of magnetic layers; and (3) planarizing the substrate to expose edges of the shielding layers.