The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
May. 18, 2020
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Michele Folz, Pavia, IT;
Giacomo Laghi, Los Gatos, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 2015/0868 (2013.01);
Abstract
A MEMS accelerometer includes at least one proof mass and two or more drive electrodes associated with each proof mass. Self-test signals are applied to the drive electrodes. The self-test signals have a signal pattern that includes different duty cycles being applied to the drive electrodes simultaneously, which in turn imparts an electrostatic force on the proof mass. The response of the proof mass to the electrostatic force is measured to determine a sensitivity of the MEMS accelerometer.