The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Jul. 06, 2017
Hitachi, Ltd., Tokyo, JP;
Taiichi Takezaki, Tokyo, JP;
Shuntaro Machida, Tokyo, JP;
Daisuke Ryuzaki, Tokyo, JP;
Yasuhiro Yoshimura, Tokyo, JP;
Tatsuya Nagata, Tokyo, JP;
Naoaki Yamashita, Tokyo, JP;
FUJIFILM HEALTHCARE CORPORATION, Chiba, JP;
Abstract
A capacitive micromachined ultrasonic transducerA includes: a silicon substratean insulating filmformed over the silicon substratea lower electrode; insulating filmsanda cavityconstituted by a void formed in a portion of the insulating filman upper electrodeinsulating filmsandand a protective filmIn addition, the insulating filmupper electrodeinsulating filmand insulating filmabove the cavityconfigure a vibration filmand the protective filmabove the vibration filmis divided into a plurality of isolated patterns regularly arranged with a gaphaving a constant spacing formed therebetween.