The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Jan. 05, 2020
Applicant:
Silicon Microstructures, Inc., Milpitas, CA (US);
Inventors:
Omar Abed, San Jose, CA (US);
Gertjan van Sprakelaar, Fremont, CA (US);
Justin Gaynor, Mountain View, CA (US);
Assignee:
MEASUREMENT SPECIALTIES, INC., Hampton, VA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/69 (2006.01); G01F 1/684 (2006.01); G01F 1/696 (2006.01); G01F 15/14 (2006.01); G01F 1/692 (2006.01); G01F 15/02 (2006.01);
U.S. Cl.
CPC ...
G01F 1/69 (2013.01); G01F 1/6847 (2013.01); G01F 1/696 (2013.01);
Abstract
Reliable flow sensors with enclosures that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures in silicon blocks. Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques.