The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Jun. 22, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Lara Hawrylchak, Gilroy, CA (US);
Agus Sofian Tjandra, Milpitas, CA (US);
Emre Cuvalci, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, unknown;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01M 8/04 (2016.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4557 (2013.01); C23C 16/4584 (2013.01); C23C 16/45587 (2013.01);
Abstract
A gas injection apparatus for a thermal processing chamber includes a gas injector having an inlet at a first end and a port at a second end; and a plate having a first opening matching the port, one or more second openings, and at least one circuitous flow path defined by the plate and fluidly connecting the first opening to the one or more second openings.
Quick Actions:
Hawrylchak, Lara. (2022). Gas injection apparatus with heating channels (U.S. Patent No. 11268193). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11268193
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile