The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Jun. 07, 2019
Samsung Display Co., Ltd., Yongin-si, KR;
Woo Jin Kim, Hwaseong-si, KR;
Dong Kyun Ko, Hwaseong-si, KR;
Keun Hee Park, Seoul, KR;
Myung Soo Huh, Suwon-si, KR;
Seon Uk Park, Hwaseong-si, KR;
SAMSUNG DISPLAY CO, LTD., Yongin-si, KR;
Abstract
A thin film processing apparatus includes a susceptor and a showerhead facing the susceptor. The showerhead includes a first plate including an inner tunnel, a first injection hole, and a second injection hole. The inner tunnel extends across the first plate in a thickness direction of the first plate. The first injection hole penetrates a first surface and a second surface of the first plate on opposite sides of the first plate in the thickness direction. The second injection hole penetrates the second surface of the first plate. The second injection is connected with the inner tunnel.