The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 08, 2022

Filed:

Mar. 10, 2015
Applicant:

Universal Display Corporation, Ewing, NJ (US);

Inventors:

Gregory McGraw, Yardley, PA (US);

William E. Quinn, Whitehouse Station, NJ (US);

Matthew King, Evesham, NJ (US);

Elliot H. Hartford, Jr., Morristown, NJ (US);

Siddharth Harikrishna Mohan, Plainsboro, NJ (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05B 12/18 (2018.01); C23C 14/22 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01);
U.S. Cl.
CPC ...
B05B 12/18 (2018.02); C23C 14/04 (2013.01); C23C 14/12 (2013.01); C23C 14/228 (2013.01);
Abstract

Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.


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