The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Feb. 06, 2020
Applicant:
Fermi Research Alliance, Llc, Batavia, IL (US);
Inventors:
Sam Posen, Arlington Heights, IL (US);
Anna Grassellino, Batavia, IL (US);
Assignee:
FERMI RESEARCH ALLIANCE, LLC, Batavia, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05H 7/20 (2006.01); H01P 11/00 (2006.01); C23C 16/06 (2006.01); C23C 16/448 (2006.01); C23C 16/04 (2006.01); H01P 7/06 (2006.01); C01G 33/00 (2006.01); H01L 39/24 (2006.01); H01B 1/02 (2006.01); H01L 39/00 (2006.01); C01G 19/00 (2006.01);
U.S. Cl.
CPC ...
H05H 7/20 (2013.01); C23C 16/045 (2013.01); C23C 16/06 (2013.01); C23C 16/4485 (2013.01); H01P 7/06 (2013.01); H01P 11/008 (2013.01); C01G 19/00 (2013.01); C01G 33/00 (2013.01); H01B 1/02 (2013.01); H01L 39/00 (2013.01); H01L 39/24 (2013.01); H01L 39/2406 (2013.01); H01L 39/2432 (2013.01); H01L 39/2438 (2013.01);
Abstract
A system and method for treating a cavity comprises arranging a niobium structure in a coating chamber, the coating chamber being arranged inside a furnace, coating the niobium structure with tin thereby forming an NbSn layer on the niobium structure, and doping the NbSn layer with nitrogen, thereby forming a nitrogen doped NbSn layer on the niobium structure.