The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Mar. 02, 2019
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Jeronimo Segovia Fernandez, San Jose, CA (US);
Peter Smeys, San Jose, CA (US);
Ting-Ta Yen, San Jose, CA (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); H03H 9/02015 (2013.01); H03H 9/02047 (2013.01); H03H 9/02062 (2013.01); H03H 9/02118 (2013.01); H03H 9/15 (2013.01); H03H 2009/155 (2013.01);
Abstract
A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.