The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Oct. 25, 2016
Applicant:

The Japan Steel Works, Ltd., Tokyo, JP;

Inventors:

Ryo Shimizu, Kanagawa, JP;

Miki Sawai, Kanagawa, JP;

Hirotaka Sazuka, Kanagawa, JP;

Daisuke Ito, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C03B 25/093 (2006.01); C03B 35/24 (2006.01); B23K 26/354 (2014.01); B23K 26/08 (2014.01); B65G 51/03 (2006.01); C03B 25/02 (2006.01); C03B 35/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); C03B 32/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67784 (2013.01); B23K 26/0838 (2013.01); B23K 26/354 (2015.10); B65G 51/03 (2013.01); C03B 25/02 (2013.01); C03B 25/093 (2013.01); C03B 35/005 (2013.01); C03B 35/24 (2013.01); H01L 21/6776 (2013.01); H01L 21/67115 (2013.01); H01L 21/67259 (2013.01); H01L 21/6838 (2013.01); B65G 2249/04 (2013.01); C03B 32/02 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02675 (2013.01); H01L 21/6831 (2013.01);
Abstract

A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.


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