The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
May. 19, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
William T. Weaver, Austin, TX (US);
Jason M. Schaller, Austin, TX (US);
Robert Brent Vopat, Austin, TX (US);
David Blahnik, Round Rock, TX (US);
Benjamin B. Riordon, Newburyport, MA (US);
Paul E. Pergande, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67754 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67196 (2013.01); H01L 21/67742 (2013.01); H01L 21/67745 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01);
Abstract
Buffer chamber including robots, a carousel and at least one heating module for use with a batch processing chamber are described. Robot configurations for rapid and repeatable movement of wafers into and out of the buffer chamber and cluster tools incorporating the buffer chambers and robots are described.