The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Oct. 22, 2018
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Shinya Soneda, Tokyo, JP;

Kenji Harada, Tokyo, JP;

Yosuke Nakata, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/288 (2006.01); H01L 23/00 (2006.01); C23C 18/16 (2006.01); C23C 18/31 (2006.01); C23C 18/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/288 (2013.01); C23C 18/165 (2013.01); C23C 18/1637 (2013.01); C23C 18/31 (2013.01); C23C 18/32 (2013.01); H01L 24/03 (2013.01); H01L 2924/13055 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/351 (2013.01);
Abstract

Provided is a method for manufacturing a semiconductor device that improves the reliability of the semiconductor device under thermal stress and the assembly performance of the semiconductor device in manufacturing steps. The method includes the following: forming a first electrode by depositing a first conductive film onto one main surface of a semiconductor substrate and patterning the first conductive film; forming a first metal film corresponding to a pattern of the first electrode onto the first electrode; forming a second electrode by depositing a second conductive film onto the other main surface of the semiconductor substrate; forming a second metal film thinner than the first metal film onto the second electrode; and collectively forming a third metal film onto each of the first metal film and the second metal film by electroless plating.


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