The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Jun. 30, 2020
Applicant:
Coorstek Kk, Tokyo, JP;
Inventor:
Hiroki Watanabe, Hadano, JP;
Assignee:
COORSTEK KK, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/225 (2006.01); H01L 21/50 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2257 (2013.01); H01L 21/50 (2013.01);
Abstract
A diffuser includes a diffuser element made of silicon carbide having conductivity, conductive holding members for holding the diffuser element, conductive gaskets that seal between the diffuser element and the holding members. Static electricity on the diffuser element is eliminated through the gaskets, and the holding members.