The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Jan. 10, 2019
Lam Research Corporation, Fremont, CA (US);
Kapil Sawlani, San Jose, CA (US);
Richard A. Gottscho, Pleasanton, CA (US);
Michal Danek, Cupertino, CA (US);
Keith Wells, Santa Cruz, CA (US);
Keith Hansen, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Defects on a substrate comprising electronic components can be classified with a computational defect analysis system that may be implemented in multiple stages. For example, a first stage classification engine may process metrology data to produce an initial classification of defects. A second stage classification engine may use the initial classification, along with manufacturing information and/or prior defect knowledge to output probabilities that the defects are caused by one or more potential sources.