The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Feb. 28, 2020
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Julius Ming-Lin Tsai, San Jose, CA (US);
Mike Daneman, Campbell, CA (US);
Sanjiv Kapoor, San Jose, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); G06K 9/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01H 11/08 (2006.01);
U.S. Cl.
CPC ...
G06K 9/0002 (2013.01); B06B 1/067 (2013.01); B06B 1/0666 (2013.01); B81B 7/007 (2013.01); B81C 1/00238 (2013.01); B81C 1/00246 (2013.01); B81C 1/00301 (2013.01); G01H 11/08 (2013.01); B06B 2201/70 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/032 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/012 (2013.01); B81B 2207/015 (2013.01); B81C 2201/0105 (2013.01); B81C 2201/0109 (2013.01); B81C 2203/035 (2013.01); B81C 2203/036 (2013.01); B81C 2203/0792 (2013.01);
Abstract
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.