The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Oct. 28, 2020
Mitsubishi Electric Research Laboratories, Inc., Cambridge, MA (US);
David Millar, Concord, MA (US);
Celalettin Yurdakul, Boston, MA (US);
Pu Wang, Cambridge, MA (US);
Kieran Parsons, Cambridge, MA (US);
Mitsubishi Electric Research Laboratories, Inc., Cambridge, MA (US);
Abstract
An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a spectrometer. The line-field generator includes a filter arranged in a focal plane of a lens for spatially filtering extended line-field light into a line-field light of a width equal to the lateral resolution. The interferometer is configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern. The spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.