The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Apr. 09, 2019
Applicant:

Silcotek Corp., Bellefonte, PA (US);

Inventors:

Thomas F. Vezza, State College, PA (US);

James B. Mattzela, Port Matilda, PA (US);

Gary A. Barone, State College, PA (US);

Jesse Bischof, State College, PA (US);

David A. Smith, Bellefonte, PA (US);

Assignee:

SilcoTek Corp., Bellefonte, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); B32B 15/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/44 (2013.01); B32B 15/00 (2013.01); H01L 21/02123 (2013.01);
Abstract

Chemical vapor deposition processes and coated articles are disclosed. The process includes a first introducing of a first amount of silane to the enclosed chamber, the first amount of the silane remaining within the enclosed chamber for a first period of time, a first decomposing of the first amount of the silane during at least a portion of the first period of time, a second introducing of a second amount of the silane to the enclosed chamber, the second amount of the silane remaining within the enclosed chamber for a second period of time, and a second decomposing of the second amount of the silane during at least a portion of the second period of time. The process is devoid of inert gas purging between the first decomposing and the second introducing and/or produces a chemical vapor deposition coating devoid of hydrogen bubbles.


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