The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Nov. 25, 2016
Applicant:

Element Six Technologies Limited, Didcot, GB;

Inventors:

Benjamin Wickham, Didcot, GB;

Andrew Michael Bennett, Didcot, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/27 (2006.01);
U.S. Cl.
CPC ...
C23C 16/274 (2013.01);
Abstract

A poly crystalline chemical vapour deposited (CVD) diamond wafer comprising: —a diameter >40 mm; —a thickness >1.0 mm; —an absorption coefficient ≤0.1 cmat 10.6 μm; and ⋅a micro feature density, especially in the form of 'black spots', meeting the following specification: —in a central area of the polycrystalline CVD diamond wafer from 0 to 20 mm radius there are no more than 100 micro features of a size between 0.002 and 0.008 mm, no more than 50 micro features of a size between 0.008 and 0.018 mm, no more than 25 microfeatures of a size between 0.018 and 0.05 mm, and zero microfeatures of a size between 0.05 and 0.1 mm, and ⋅in an outer region of the polycrystalline CVD diamond wafer from 20 to 40 mm radius there are no more than 200 microfeaturesof a size between 0.002 and 0.008 mm, no more than 150 microfeatures of a size between 0.008 and 0.018 mm, no more than 100 microfeatures of a size between 0.018 and 0.05 mm, and zero microfeatures of a size between 0.05 and 0.1 mm.


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