The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Feb. 13, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Shinichi Hirano, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus for bringing a mold and an imprint material on a substrate into contact with each other and performing imprint processing for forming a pattern of the imprint material is provided. The apparatus comprises a supplier configured to supply the imprint material on the substrate in accordance with a supply pattern of the imprint material, and a controller configured to control the supplier, wherein the controller obtains a contact timing as a timing at which the mold and the imprint material are brought into contact with each other at each of a plurality of positions of the mold, and determines the supply pattern based on the obtained contact timing.