The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Nov. 15, 2017
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Yosuke Horie, Tokyo, JP;

Atsushi Kazama, Tokyo, JP;

Tetsuji Kawahara, Tokyo, JP;

Takamichi Mori, Tokyo, JP;

Kohei Nonaka, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); B01L 3/00 (2006.01); B08B 7/02 (2006.01); G01N 35/10 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); B01L 3/508 (2013.01); B01L 13/00 (2019.08); B08B 7/028 (2013.01); G01N 35/1004 (2013.01); B01L 2300/06 (2013.01); B01L 2300/0858 (2013.01);
Abstract

An ultrasonic cleaner includes: a cleaning tank; an ultrasonic transducer; a vibration head which extends from the ultrasonic transducer toward the cleaning tank and of which a tip portion includes a cylindrical hole having a longitudinal direction aligned to a vertical direction; and an air layer or a metallic member that is provided in an area formed by projecting at least the vibration head in the vertical direction under the cleaning tank, wherein the ultrasonic transducer is driven at a frequency at which the vibration head is vibrated resonantly in a vibration mode accompanied by a deformation in the longitudinal direction of the cylindrical hole and a direction perpendicular to the longitudinal direction, wherein an area formed by projecting at least the vibration head in the vertical direction in a bottom portion of the cleaning tank is formed of a material mainly including resin.


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