The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Jan. 19, 2021
Applicant:
The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US);
Inventors:
Bo Ma, Palo Alto, CA (US);
Jose Joseph, Stanford, CA (US);
Kamyar Firouzi, Palo Alto, CA (US);
Butrus T. Khuri-Yakub, Palo Alto, CA (US);
Assignee:
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY, Stanford, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B06B 1/06 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01N 29/06 (2006.01); G01N 29/24 (2006.01); G01N 29/22 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0215 (2013.01); B06B 1/0292 (2013.01); B06B 1/0651 (2013.01); B06B 1/0662 (2013.01); B81B 3/0021 (2013.01); B81C 1/00166 (2013.01); G01N 29/0654 (2013.01); G01N 29/2406 (2013.01); B06B 2201/55 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0157 (2013.01); B81C 2201/0178 (2013.01); G01N 29/22 (2013.01);
Abstract
Aspects of this disclosure relate to a capacitive micromachined ultrasonic transducer (CMUT) with a contoured electrode. In certain embodiments, the CMUT has a contoured electrode. The electrode may be non-planar to correspond to a deflected shape of the outer plate. A change in distance between the electrode and the plate after deflection may be greater than a minimum threshold across the width of the CMUT.