The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Dec. 09, 2020
Applicant:

Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;

Inventor:

Wen-Yueh Jang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11521 (2017.01); H01L 29/788 (2006.01); H01L 27/11558 (2017.01); H01L 27/11519 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 27/11519 (2013.01); H01L 27/11558 (2013.01); H01L 29/788 (2013.01);
Abstract

In the memory structure, a pair of gate stack structures is on a first dielectric layer and separated from each other. Each of the gate stack structures includes a word line and a second dielectric layer. A third dielectric layer is on the sidewall of the gate stack structures. A pair of floating gates is between the gate stack structures. Each of the floating gates is on the third dielectric layer on the sidewall of the corresponding gate stack structure. The top surface of the floating gates is not higher than the that of the second dielectric layer. A fourth dielectric layer covers the first and third dielectric layers, and the floating gates. A control gate is on the fourth dielectric layer between the floating gates. A doped region is in the substrate beside the gate stack structures. An erase gate is above the control gate and the floating gates.


Find Patent Forward Citations

Loading…