The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2022
Filed:
Aug. 29, 2018
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Teppei Tanaka, Kanagawa, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/00 (2006.01); G01B 15/02 (2006.01); G01N 21/95 (2006.01); G01B 9/02 (2006.01); H01L 21/324 (2006.01); H01L 21/66 (2006.01); G01R 31/28 (2006.01); G01J 5/20 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
H01L 21/324 (2013.01); G01R 31/2831 (2013.01); H01L 22/14 (2013.01); G01J 5/20 (2013.01); H01L 21/268 (2013.01); H01L 22/20 (2013.01);
Abstract
A laser beam from a laser optical system is incident onto a semiconductor wafer. Thermal radiation light from the semiconductor wafer is incident onto an infrared detector. The infrared detector outputs a signal based on the intensity of the thermal radiation light. A processing device calculates a sheet resistance of the semiconductor wafer that is annealed by the laser beam on the basis of an output value of the infrared detector, and outputs a calculation value of the sheet resistance to an output device.