The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Jun. 26, 2019
Applicant:

Cypress Semiconductor Corporation, San Jose, CA (US);

Inventors:

Shenqing Fang, Sunnyvale, CA (US);

Timothy Thurgate, Sunnyvale, CA (US);

Kuo Tung Chang, Saratoga, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/26 (2006.01); H01L 21/265 (2006.01); H01L 29/8605 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/26586 (2013.01); H01L 21/26513 (2013.01); H01L 28/20 (2013.01); H01L 29/8605 (2013.01);
Abstract

A semiconductor device having a substrate, a dielectric layer, a polycrystalline silicon ('poly') resistor, a drain, and a source is disclosed. After implantation, the poly resistor may have a lateral doping profile with two peaks, one near each edge of the poly resistor, and a trough near the middle of the poly resistor. Such a doping profile can allow the poly resistor to have a resistance that is insensitive to small variations in critical dimension of the poly resistor. The resistance of the poly resistor may be determined by the doping dose of the tilted implant used to form the poly resistor. The tilted implant may be used to form the drain and the source of a transistor substantially simultaneously as forming the poly resistor.


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