The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Dec. 04, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Soyoung Lee, Hwasung-si, KR;

Hiroshi Nihei, Hwasung-si, KR;

Takamasa Miyazaki, Hwasung-si, KR;

Yousuke Satou, Hwasung-si, KR;

Kouhei Sugimoto, Hwasung-si, KR;

Masashi Shirai, Hwasung-si, KR;

Jaesoon Lim, Hwasung-si, KR;

Younsoo Kim, Hwasung-si, KR;

Younjoung Cho, Hwasung-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01); C07F 15/06 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 15/06 (2013.01); C23C 16/18 (2013.01); C23C 16/45527 (2013.01); H01L 21/0228 (2013.01); H01L 21/02274 (2013.01); H01L 21/02277 (2013.01); H01L 21/3213 (2013.01);
Abstract

The inventive concept relates to a cobalt precursor, a method for manufacturing a cobalt-containing layer using the same, and a method for manufacturing a semiconductor device using the same. More particularly, the cobalt precursor of the inventive concept includes at least one compound selected from the group consisting of a compound of Formula 1 and a compound of Formula 2.


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