The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Aug. 03, 2020
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Inventors:
Tae Kyung Lee, Suwon-si, KR;
Tae Yoon Kim, Suwon-si, KR;
Dae Ho Kim, Suwon-si, KR;
Chang Hyun Lim, Suwon-si, KR;
Tae Hun Lee, Suwon-si, KR;
Sang Kee Yoon, Suwon-si, KR;
Jong Woon Kim, Suwon-si, KR;
Won Han, Suwon-si, KR;
Moon Chul Lee, Suwon-si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/56 (2006.01); H03H 9/17 (2006.01); H03H 9/60 (2006.01); H03H 9/54 (2006.01); H03H 3/02 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02015 (2013.01); H01L 41/047 (2013.01); H03H 3/02 (2013.01); H03H 9/02062 (2013.01); H03H 9/02118 (2013.01); H03H 9/02157 (2013.01); H03H 9/173 (2013.01); H03H 9/547 (2013.01); H03H 9/562 (2013.01); H03H 9/568 (2013.01); H03H 9/605 (2013.01); H03H 9/542 (2013.01); H03H 9/545 (2013.01); H03H 2003/021 (2013.01);
Abstract
A bulk acoustic resonator includes: a substrate including an upper surface on which a substrate protection layer is disposed; and a membrane layer forming a cavity together with the substrate, wherein a thickness deviation of either one or both of the substrate protection layer and the membrane layer is 170 Å or less.