The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Mar. 27, 2020
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/107 (2006.01); G02B 6/136 (2006.01); H01L 31/18 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1075 (2013.01); G02B 6/136 (2013.01); H01L 31/1804 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12123 (2013.01);
Abstract
The invention relates to a method of fabrication of a photonic chipcomprising an avalanche photodiodeof the SACM type optically coupled to an integrated waveguide, comprising a step for forming a first spacerallowing a constant peripheral recessing drof the charge regionto be defined later on with respect to an edge of the multiplication portion, then a step for forming a second spacerallowing a constant peripheral recessing drof the absorption portionto be defined later on with respect to an edge of the charge region