The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

Apr. 17, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventor:

So Hyeon Lee, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11 (2006.01); H01L 27/11582 (2017.01); H01L 23/522 (2006.01); H01L 29/417 (2006.01); H01L 27/11521 (2017.01); H01L 27/11556 (2017.01); H01L 27/11568 (2017.01); H01L 29/423 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 29/788 (2006.01); H01L 29/66 (2006.01); H01L 21/3115 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 27/11521 (2013.01); H01L 27/11556 (2013.01); H01L 27/11568 (2013.01); H01L 29/41775 (2013.01); H01L 29/4234 (2013.01); H01L 29/42324 (2013.01); H01L 21/02532 (2013.01); H01L 21/02636 (2013.01); H01L 21/31111 (2013.01); H01L 21/31155 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 21/76897 (2013.01); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08); H01L 29/66545 (2013.01); H01L 29/7883 (2013.01);
Abstract

A semiconductor device includes a vertical stack of gate electrodes. The gate electrodes extend in different lengths to provide contact regions. The gate electrodes have a conductive region and an insulating region. Contact plugs fills contact holes that pass through the stack of gate electrodes in the contact regions. The contact plugs are connected to the gate electrodes. The contact plugs pass through a conductive region of one gate electrode and are electrically connected to the one gate electrode and pass through the insulating region of other gate electrodes in the contact region. The insulating region is disposed outside of the contact holes in a region in which the gate electrodes intersect the contact plugs.


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