The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

Aug. 11, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Seok-Hyun Kim, Incheon, KR;

Joon Young Kang, Suwon-si, KR;

Youngjun Kim, Osan-si, KR;

Jinhyung Park, Bucheon-si, KR;

Ho-Ju Song, Seongnam-si, KR;

Sang-Jun Lee, Incheon, KR;

Hyeran Lee, Hwaseong-si, KR;

Bong-Soo Kim, Yongin-si, KR;

Sungwoo Kim, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/00 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10897 (2013.01); H01L 27/10814 (2013.01); H01L 27/10823 (2013.01); H01L 27/10885 (2013.01); H01L 27/10888 (2013.01); H01L 27/10894 (2013.01);
Abstract

A semiconductor memory device including: a substrate including a cell array region and a boundary region; a first recess region at an upper portion of the substrate in the cell array region; a first bit line extending onto the boundary region and crossing the first recess region; a bit line contact in the first recess region and contacting the first bit line; a second bit line spaced apart from the first recess region and adjacent to the first bit line, the second bit line crossing the cell array region and the boundary region; a cell buried insulation pattern between a side surface of the first bit line contact and an inner wall of the first recess region; and a boundary buried insulation pattern covering sidewalls of the first bit line and the second bit line in the boundary region and including a same material as the cell buried insulation pattern.


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