The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Aug. 11, 2020
Applicant:
Stmicroelectronics (Crolles 2) Sas, Crolles, FR;
Inventors:
Assignee:
STMicroelectronics (Grolles 2) SAS, Crolles, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/3205 (2006.01); H01L 21/285 (2006.01); H01L 21/321 (2006.01); H01L 21/3215 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 21/32055 (2013.01); H01L 21/28556 (2013.01); H01L 21/3212 (2013.01); H01L 21/32155 (2013.01); H01L 23/528 (2013.01);
Abstract
An electrode is included in a base substrate. A trench is produced in the base substrate. The trench is filled with an annealed amorphous material to form the electrode. The electrode is made of a crystallized material which includes particles that are implanted into a portion of the electrode that is located adjacent the front-face side of the base substrate.