Devices, systems, and methods for limited-size divisive clustering

Abstract

Some embodiments of devices, systems, and methods generate a respective connection mask at each defect detection location in a binary defect map, wherein each detection location in the binary defect map has a value that indicates that the detection location either has a defect or, alternatively, does not have a defect; generate one or more clusters of defect detection locations in the binary defect map based on each defect location's respective connection mask and on the binary defect map; generate respective bounding boxes for the one or more clusters; and recursively perform the following: checking respective sizes of the bounding boxes, and splitting any clusters of the one or more clusters that have respective bounding boxes with sizes that exceed one or more thresholds, thereby generating additional clusters of defect locations.