The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

May. 07, 2020
Applicant:

Facebook Technologies, Llc, Menlo Park, CA (US);

Inventors:

Nihar Ranjan Mohanty, Snoqualmie, WA (US);

Matthieu Charles Raoul Leibovici, Seattle, WA (US);

Assignee:

FACEBOOK TECHNOLOGIES, LLC, Menlo Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01); G02B 5/18 (2006.01); F21V 8/00 (2006.01); G03F 7/00 (2006.01); B82Y 40/00 (2011.01); H01L 21/3065 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01); G02B 27/01 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1857 (2013.01); B82Y 40/00 (2013.01); G02B 6/0016 (2013.01); G02B 6/0036 (2013.01); G03F 7/0002 (2013.01); H01L 21/0337 (2013.01); H01L 21/3065 (2013.01); H01L 21/3086 (2013.01); G02B 27/0172 (2013.01);
Abstract

A surface-relief grating includes a base surface-relief grating comprising a plurality of ridges that include a first material, and a second material on only a top surface or a single sidewall of each ridge of the plurality of ridges, where the second material is different from the first material. A method of fabricating the surface-relief grating includes etching or molding a base surface-relief grating that includes a plurality of ridges, depositing a material layer on the plurality of ridges, and selectively etching the material layer to increase a height or a slant angle of an edge of a ridge in the plurality of ridges to make the surface-relief grating that includes the base surface-relief grating.


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