The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Nov. 16, 2018
Applicant:
Sciosense B.v., AE Eindhoven, NL;
Inventors:
Willem Frederik Adrianus Besling, JN Eindhoven, NL;
Casper Van Der Avoort, TG Waalre, NL;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
Olaf Wunnicke, Eindhoven, NL;
Jörg Siegert, Graz, AT;
Alessandro Faes, Premstätten, AT;
Assignee:
SCIOSENSE B.V., AE Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 9/12 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01); G01L 9/005 (2013.01); G01L 9/12 (2013.01); G01L 19/0061 (2013.01);
Abstract
Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.