The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Aug. 09, 2019
Applicant:
Industrial Cooperation Foundation Chonbuk National University, Jeonju-si, KR;
Inventor:
Daesuk Kim, Jeonju-si, KR;
Assignee:
INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY, Jeollabuk-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/08 (2006.01); G01J 3/02 (2006.01); G01J 3/12 (2006.01); G01J 3/447 (2006.01); G01J 3/453 (2006.01);
U.S. Cl.
CPC ...
G01J 3/08 (2013.01); G01J 3/0224 (2013.01); G01J 3/12 (2013.01); G01J 3/447 (2013.01); G01J 3/4531 (2013.01);
Abstract
The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.