The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

Mar. 02, 2017
Applicant:

Nippon Itf, Inc., Kyoto, JP;

Inventors:

Hideki Moriguchi, Kyoto, JP;

Akinori Shibata, Kyoto, JP;

Assignee:

NIPPON ITF, INC., Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/00 (2006.01); C01B 32/05 (2017.01); C23C 14/32 (2006.01); C23C 14/54 (2006.01); C23C 14/50 (2006.01); C23C 14/06 (2006.01); C01B 32/15 (2017.01);
U.S. Cl.
CPC ...
C01B 32/05 (2017.08); C01B 32/15 (2017.08); C23C 14/0605 (2013.01); C23C 14/0611 (2013.01); C23C 14/32 (2013.01); C23C 14/325 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 14/541 (2013.01); B32B 9/007 (2013.01); Y10T 428/30 (2015.01);
Abstract

Provided is a physical vapor deposition (PVD) method in which a thick, hard carbon film having excellent durability can be formed, and chipping resistance and wear resistance can bot be achieved while improving the low friction properties and peeling resistance of the formed hard carbon film. Provided is a coating film having a total film thickness of greater than 1 μm and less than or equal to 50 μm, wherein, when observed using a bright field TEM image, the cross section of the coating film is revealed to consist of relatively white hard carbon layers and relatively black hard carbon layers alternately stacked in the thickness direction, and the white hard carbon layers have a region having a columns-shape, which has grown in the thickness direction.


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