The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

Oct. 19, 2018
Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Hideki Yoshida, Nagaoka, JP;

Masaei Suwada, Nagaoka, JP;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B25J 9/16 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); G05B 19/402 (2006.01);
U.S. Cl.
CPC ...
B25J 9/163 (2013.01); B25J 15/00 (2013.01); H01L 21/67201 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); G05B 19/402 (2013.01); G05B 2219/39548 (2013.01); G05B 2219/42129 (2013.01); H01L 21/67167 (2013.01); Y10T 279/26 (2015.01);
Abstract

Examples of a method for teaching a transportation position includes correcting the position of an alignment jig having a plurality of sloping surfaces relative to a susceptor pin projecting upwards from an upper surface of a susceptor by lowering a robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surfaces by virtue of an own weight of the aliment jig, detecting a position of the alignment jig before and after the positional correction of the alignment jig, and correcting a movement destination information by an amount corresponding to a difference between an initial position and a corrected position of the alignment jig.


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