The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Oct. 17, 2019
Applicant:
University of Rochester, Rochester, NY (US);
Inventors:
Jaime Cardenas, Rochester, NY (US);
Yi Zhang, Rochester, NY (US);
Assignee:
University of Rochester, Rochester, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/035 (2006.01); H01L 21/02 (2006.01); C23C 16/34 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
G02F 1/035 (2013.01); C23C 16/345 (2013.01); C23C 16/50 (2013.01); H01L 21/0217 (2013.01); H01L 21/02274 (2013.01); G02F 2202/20 (2013.01);
Abstract
A deposition method for manufacturing an active electro-optic layer includes providing a substrate or a base layer; and applying an electric field across a silicon nitride layer as it is being deposited on the substrate or the base layer to cause a poling of a deposited layer. Alternative methods for poling an active electro-optic layer and an electro-optical device are also described.