The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Jan. 22, 2018
Beihang University, Beijing, CN;
Beihang University, Beijing, CN;
Abstract
An acceleration sensor with differential graphene resonant beams includes a substrate, a sensitive mass plate, a first insulating layer, a second insulating layer, a first excitation electrode pair, a first graphene resonant beam, a second graphene resonant beam, a third insulating layer, a second excitation electrode pair, and a vacuum cover. An indirect acceleration-sensitive mode is adopted, so that the sensitive mass block directly senses acceleration to be measured, and converts the acceleration to be measured into a concentrated force to cause axial displacement of the sensitive mass block and then to cause a change in the axial stress of the graphene resonate beams, thereby causing a change in the resonant frequency of the beams.