The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Aug. 15, 2014
Applicant:
Yokogawa Electric Corporation, Musashino, JP;
Inventors:
Takashi Yoshida, Musashino, JP;
Yuusaku Yoshida, Musashino, JP;
Atsushi Yumoto, Musashino, JP;
Yoshitaka Suzuki, Musashino, JP;
Assignee:
Yokogawa Electric Corporation, Musashino, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/08 (2006.01); G01L 9/12 (2006.01); G01L 7/08 (2006.01); G01L 7/02 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 7/082 (2013.01); G01L 7/022 (2013.01); G01L 7/08 (2013.01); G01L 9/0008 (2013.01); G01L 9/0047 (2013.01); Y10T 29/4913 (2015.01);
Abstract
A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.