The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Sep. 17, 2018
Trumpf Lasersystems for Semiconductor Manufacturing Gmbh, Ditzingen, DE;
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH, Ditzingen, DE;
Abstract
The invention relates to a method for determining at least one beam propagation parameter (M, w, θ, z) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F, . . . ) relative to the spatially resolving detector by adjusting a focal length (f, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M, w, θ, z) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F, . . . ). The method comprises adjusting the focal length (f, . . . ) of the lens arrangement by arranging lens elements (A, . . . ; B, . . . ) having different focal lengths (f, . . . ; f, . . . ) in a beam path of the laser beam.