The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Apr. 17, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Joseph Antony Jonathan, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Jason A. Rye, Kalispell, MT (US);
James E. Brown, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Eric J. Bergman, Kalispell, MT (US);
Tricia A. Youngbull, Kalispell, MT (US);
Timothy G. Stolt, Kalispell, MT (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.