The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2022

Filed:

Jun. 29, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Keiichi Yamaguchi, Ina, JP;

Seiichiro Ogura, Minowa, JP;

Masahiro Oshio, Shiojiri, JP;

Ryuta Nishizawa, Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/053 (2006.01); H01L 41/22 (2013.01); H01L 41/047 (2006.01); H03H 9/10 (2006.01); H03H 9/215 (2006.01); H03H 9/05 (2006.01); H03H 3/04 (2006.01); H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0926 (2013.01); H01L 41/047 (2013.01); H01L 41/053 (2013.01); H01L 41/22 (2013.01); H03H 3/04 (2013.01); H03H 9/0528 (2013.01); H03H 9/0547 (2013.01); H03H 9/1014 (2013.01); H03H 9/215 (2013.01); H01L 41/042 (2013.01); H03H 2003/045 (2013.01); H03H 2003/0442 (2013.01);
Abstract

A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.


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