The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Dec. 06, 2019
Gangfeng YE, Fremont, CA (US);
Gangfeng Ye, Fremont, CA (US);
Other;
Abstract
A vertical JFET is provided. The JFET is mixed with lateral channel structure and p-GaN gate structure. The JFET has an improved barrier layer for p-GaN block layer and enhanced Ohmic contact with source. In one embodiment, regrowth of lateral channel is provided so that counter doping surface Mg will be buried. In another embodiment, a dielectric layer is provided to protect p-type block layer during the processing, and later make Ohmic source and p-type block layer. Method of a barrier regrown layer for enhanced lateral channel performance is provided where a regrown barrier layer is deposited over the drift layer. The barrier regrown layer is an anti-p-doping layer. Method of a patterned regrowth for enhanced Ohmic contact is provided where a patterned masked is used for the regrowth.