The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
May. 04, 2020
Applicant:
Qualcomm Incorporated, San Diego, CA (US);
Inventors:
Assignee:
Qualcomm Incorporated, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 49/02 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 28/65 (2013.01); H01L 21/768 (2013.01); H01L 23/5223 (2013.01); H01L 23/5226 (2013.01);
Abstract
Certain aspects of the present disclosure generally relate to a metal-oxide-metal (MOM) capacitor formed from a subtractive back-end-of-line (BEOL) scheme. One example method of fabricating a semiconductor device generally includes forming an active layer and forming a capacitive element above the active layer with a back-end-of-line subtractive process for conductive materials.