The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Jan. 10, 2018
Toshiba Mitsubishi-electric Industrial Systems Corporation, Tokyo, JP;
Kensuke Watanabe, Tokyo, JP;
Shinichi Nishimura, Tokyo, JP;
Ren Arita, Tokyo, JP;
Yoshihito Yamada, Tokyo, JP;
Yoichiro Tabata, Tokyo, JP;
Abstract
The present invention has features (1) to (3). The feature (1) is that 'an active gas generation electrode group is formed in such a manner that a ground side electrode component supports a high-voltage side electrode component'. The feature (2) is that 'stepped parts are provided in a discharge space outside region of a dielectric electrode in the high-voltage side electrode component, and project downward, and by a formation height of these stepped parts, the gap length of a discharge space is defined'. The feature (3) is that “the high-voltage side electrode component and the ground side electrode component are formed to have the thickness of a discharge space formation region relatively thin and the thickness of a discharge space outside region relatively thick”.