The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2022

Filed:

Dec. 17, 2018
Applicant:

Nitto Denko Corporation, Ibaraki, JP;

Inventor:

Daiki Morimitsu, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/02 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01); G01N 27/90 (2021.01);
U.S. Cl.
CPC ...
G01R 27/02 (2013.01); C23C 14/34 (2013.01); C23C 14/54 (2013.01); G01N 27/90 (2013.01);
Abstract

A resistance measurement device for measuring sheet resistance of an electrically conductive film that is long in one direction includes a probe unit disposed to face the electrically conductive film; a scanning unit that allows the probe unit to scan in a cross direction crossing the one direction over both a conveyance region and a non-conveyance region of the electrically conductive film; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the probe unit. The arithmetic unit has a memory that memorizes a reference voltage measured in the non-conveyance region, and corrects, based on the reference voltage, an actual voltage measured by allowing the probe unit to scan in the cross direction in the conveyance region.


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