The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Mar. 03, 2020
Infineon Technologies Ag, Neubiberg, DE;
Michael Schneider, Vienna, AT;
Alfons Dehe, Villingen Schwenningen, DE;
Manuel Dorfmeister, Vienna, AT;
Christoph Glacer, Munich, DE;
Ulrich Krumbein, Rosenheim, DE;
Ulrich Schmid, Vienna, AT;
David Tumpold, Kirchheim b München, DE;
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Abstract
A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.